Chapter 4 . Submicron and Nanometer Structures Technology and Research
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چکیده
The Submicron Structures Laboratory at MIT develops techniques for fabricating surface structures with feature sizes in the range from nanometers to micrometers and uses these structures in a variety of research projects. These projects, described briefly below, fall into four major categories: (1) development of submicron and nanometer fabrication technology; (2) nanometer and quantumeffect electronics; (3) crystalline films on non-latticematching substrates; and (4) periodic structures for x-ray optics, spectroscopy and atomic interferometry.
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تاریخ انتشار 2009